@article{831576,
  author = {Shuhui Kang and Vivek Prabhu and Christopher Soles and Eric Lin and Wen-Li Wu},
  title = {Methodology for quantitative measurements of multilayer polymer thin films with IR spectroscopic ellipsometry},
  year = {2009},
  number = {42},
  month = {2009-07-02 00:07:00},
  publisher = {Macromolecules},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902197},
  language = {en},
}