@article{831296,
  author = {Panu Koppinen and Michael Stewart and Neil Zimmerman},
  title = {Fabrication and Electrical Characterization of Fully CMOS Si Single Electron Devices},
  year = {2012},
  month = {2012-12-19 00:12:00},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911577},
  language = {en},
}