@conference{831281,
  author = {Cynthia Brooks and Benjamin Kidder and Michelle Grigas and Daniel Jaffe and Ulf Griesmann and Daniel Wilson and Richard Muller},
  title = {Process improvements in the production of silicon immersion gratings},
  year = {2016},
  month = {2016-06-26 00:06:00},
  publisher = {Astronomical Telescopes and Instrumentation, Edinburgh, UK},
  language = {en},
}