@article{831051, author = {Di XU and Vinay Sriram and Vidvuds Ozolins and Jenn-Ming Yang and K. Tu and Gery Stafford and Carlos Beauchamp and Inka Zienert and Holm Geisler and Petra Hofmann and Ehrenfried Zschech}, title = {Nanotwin formation and its physical properties and effect on reliability of copper interconnects.}, year = {2008}, month = {2008-05-03 00:05:00}, publisher = {Microelectronic Engineering}, language = {en}, }