@article{830581, author = {Siddharth Hazra and Jack Beuth and Grant Myers and Frank DelRio and Maarten de Boer}, title = {Design and test of reliable, high strength, ingressive polycrystalline silicon microgripper arrays}, year = {2015}, number = {25}, month = {2015-01-02 00:01:00}, publisher = {Journal of Micromechanics and Microengineering}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916443}, language = {en}, }