@article{830496, author = {H Hubner and M. Moertelmaier and Pavel Kabos and M. Fenner and C Rankl and Atif Imtiaz}, title = {Calibrated nanoscale capacitance measurements using a scanning microwave microscope}, year = {2010}, number = {81}, month = {2010-11-02 00:11:00}, publisher = {Review of Scientific Instruments}, doi = {https://doi.org/10.1063/1.3491926}, language = {en}, }