@article{830356, author = {Lin You and Chukwudi Okoro and Jungjoon Ahn and Joseph Kopanski and Yaw Obeng and Rhonda Franklin}, title = {Broad-Band Microwave-Based Metrology Platform Development: Demonstration of In-Situ Failure Mode Diagnostic Capabilities for Integrated Circuit Reliability Analyses}, year = {2014}, number = {4}, month = {2014-11-07 00:11:00}, publisher = {ECS Journal of Solid State Science and Technology}, doi = {https://doi.org/10.1149/2.0151501jss}, language = {en}, }