@article{830016,
  author = {Jungjae Park and Lingfeng Chen and Quandou Wang and Ulf Griesmann},
  title = {A modified Roberts-Langenbeck test for measuring thickness and refractive index variation of silicon wafers},
  year = {2012},
  month = {2012-08-17 00:08:00},
  publisher = {Optics Express},
  language = {en},
}