@article{829911, author = {Mohammad Olfatnia and Siddharth Sood and Jason Gorman and Shorya Awtar}, title = {Large Stroke Electrostatic Comb Drive Actuators Enabled by a Novel Flexure Mechanism}, year = {2013}, number = {22}, month = {2013-04-30 00:04:00}, publisher = {IEEE Journal of Microelectromechanical Systems (Journal of MEMs)}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=912124}, language = {en}, }