@article{829576, author = {Lawrence Friedman and Mark Vaudin and Stephan Stranick and Gheorghe Stan and Yvonne Gerbig and William Osborn and Robert Cook}, title = {Assessing Electron Backscattered Diffraction and Confocal Raman Microscopy Strain Mapping Using Wedge-indented Si}, year = {2016}, number = {163}, month = {2016-02-17 00:02:00}, publisher = {Ultramicroscopy}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=919078}, doi = {https://doi.org/10.1016/j.ultramic.2016.02.001}, language = {en}, }