@article{829571, author = {Karen Grutter and Marcelo Davanco and Kartik Srinivasan}, title = {Si3N4 nanobeam optomechanical crystals}, year = {2015}, number = {21}, month = {2015-07-01 00:07:00}, publisher = {IEEE Journal of Selected Topics in Quantum Electronics}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917282}, language = {en}, }