@article{829551,
  author = {Vladimir Ukraintsev and Ndubuisi Orji and Theodore Vorburger and Ronald Dixson and Joseph Fu and Richard Silver},
  title = {Distributed Force Probe Bending Model of CD-AFM Bias},
  year = {2013},
  number = {12},
  month = {2013-04-01 00:04:00},
  publisher = {Journal of Micro/Nanolithography, MEMS, and MOEMS},
  language = {en},
}