@conference{828781,
  author = {Richard Silver and Bryan Barnes and Martin Sohn and Hui Zhou and Jing Qin},
  title = {Fundamental Limits of Optical Patterned Defect Metrology},
  year = {2011},
  number = {1395},
  month = {2011-11-14 00:11:00},
  publisher = {AIP Proceedings, Grenoble, FR},
  doi = {https://doi.org/10.1063/1.3657912},
  language = {en},
}