@article{828616,
  author = {Adam Berro and Andrew Berglund and Peter Carmichael and Jong Kim and James Liddle},
  title = {Super-resolution Optical Measurement of Nanoscale Photoacid Distribution in Lithographic Materials},
  year = {2012},
  number = {6},
  month = {2012-10-26 00:10:00},
  publisher = {ACS Nano},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909231},
  doi = {https://doi.org/10.1021/nn304285m},
  language = {en},
}