@conference{828521,
  author = {Paul Lemaillet and Thomas Germer and Regis Kline and Daniel Sunday and Chengqing Wang and Wen-Li Wu},
  title = {Intercomparison between optical and x-ray scatterometry measurements of FinFET structures},
  year = {2013},
  month = {2013-04-08 00:04:00},
  publisher = {Metrology, Inspection, and Process Control for Microlithography XXVII, San Jose, CA, US},
  language = {en},
}