@article{828456,
  author = {B. Geiser and Eric Steel and Karen Henry and D. Olson and T.J. Prosa},
  title = {Analysis of Implanted Silicon Dopant Profiles},
  year = {2013},
  number = {132},
  month = {2013-09-01 00:09:00},
  publisher = {Ultramicroscopy},
  language = {en},
}