@article{827961, author = {Hongliang Shi and Hai-Jun Su and Nicholas Dagalakis and John Kramar}, title = {Kinematic Modeling and Calibration of a Flexure Based Hexapod Nanopositioner}, year = {2012}, number = {37}, month = {2012-08-21 00:08:00}, publisher = {Precision Engineering-Journal of the International Societies for Precision Engineering and Nanotechnology}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=911830}, language = {en}, }