@article{827346,
  author = {JiYoung Chu and Quandou Wang and John Lehan and Ulf Griesmann},
  title = {Spatially resolved height response of phase-shifting interferometers measured using a patterned mirror with varying spatial frequency},
  year = {2010},
  number = {49},
  month = {2010-09-01 00:09:00},
  publisher = {Optical Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=903805},
  language = {en},
}