@article{827151,
  author = {Kai Li and Pradeep Namboodiri and Sumanth Chikkamaranahalli and Gheorghe Stan and Ravikiran Attota and Joseph Fu and Richard Silver},
  title = {Controlling Formation of Atomic Step Morphology on Micro-patterned Si (100)},
  year = {2011},
  number = {29},
  month = {2011-08-09 00:08:00},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=907301},
  language = {en},
}