@misc{826656,
  author = {Xiaoxiao Zhu and H Gu and Qiliang Li and Helmut Baumgart and D. Ioannou and John Suehle and Curt Richter},
  title = {Application of ALD High-k Dielectric Films as Charge Storage Layer and Blocking Oxide in Nonvolatile Memories},
  year = {2009},
  month = {2009-10-06 00:10:00},
  language = {en},
}