@article{826276, author = {J Shi and S Grindle and S Chen and G Owen and L Insalaco and C Cromer and Lori Goldner}, title = {UV Radiometry Issues for UV Stabilization of Photoresist}, year = {1995}, number = {2440}, month = {1995-01-01 00:01:00}, publisher = {Proc SPIE's 1995 International Symposium on Microlithography}, language = {en}, }