@article{article,
  author = {J Shi and S Grindle and S Chen and G Owen and L Insalaco and C Cromer and Lori Goldner},
  title = {UV Radiometry Issues for UV Stabilization of Photoresist},
  year = {1995},
  number = {2440},
  month = {1995-01-01 00:01:00},
  publisher = {Proc SPIE{\textquoteright}s 1995 International Symposium on Microlithography},
  language = {en},
}