@article{824096,
  author = {Shigeo Tanuma and Cedric Powell and David Penn},
  title = {Material Dependence of Electron Inelastic Mean Free Paths at Low Energies},
  year = {1990},
  number = {8},
  month = {1990-01-01 00:01:00},
  publisher = {Journal of Vacuum Science and Technology A},
  language = {en},
}