@conference{823411, author = {Shuhui Kang and Vivek Prabhu and Wen-Li Wu and Eric Lin and Kwang-Woo Choi and Manish Chandhok and Todd Younkin and Wang Yueh}, title = {Characterization of the Photoacid Diffusion Length}, year = {2009}, month = {2009-02-27 00:02:00}, publisher = {Proceedings of SPIE, San Jose, CA, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902190}, language = {en}, }