@article{823136,
  author = {B Vogt and Shuhui Kang and Vivek Prabhu and Eric Lin and Sushil Satija and Karen Turnquest and Wen-Li Wu},
  title = {Measurements of the Reaction-Diffusion Front of Model Chemically Amplified Photoresists With Varying Photoacid Size},
  year = {2006},
  number = {39},
  month = {2006-10-26 00:10:00},
  publisher = {Macromolecules},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852650},
  language = {en},
}