@article{823066,
  author = {Kristopher Lavery and B Vogt and Vivek Prabhu and Eric Lin and Wen-Li Wu and Kwang-Woo Choi},
  title = {Exposure Dose Effects on the Reaction-Diffusion Process in Model extreme ultraviolet Photoresists},
  year = {2006},
  number = {24},
  month = {2006-11-30 00:11:00},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852653},
  language = {en},
}