@misc{823061,
  author = {Chad Snyder and F Mopsik},
  title = {NIST Recommended Practice Guide: Capacitance Cell Measurement of the Out-of-Plane Expansion of Thin Films},
  year = {2001},
  number = {SP960-7},
  month = {2001-11-01 00:11:00},
  publisher = {Special Publication (NIST SP), National Institute of Standards and Technology, Gaithersburg, MD},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851966},
  doi = {https://doi.org/10.6028/NIST.SP.960-7},
  language = {en},
}