@conference{821856, author = {Madhulika Korde and Regis Kline and Daniel Sunday and Nick Keller and Subhadeep Kal and Cheryl Alix and Aelen Mosden and Alain Diebold}, title = {X-Ray Metrology of Nanowire/ Nanosheet FETs for Advanced Technology Nodes}, year = {2020}, month = {2020-03-30 00:03:00}, publisher = {SPIE Advanced Lithography, San Jose, CA, US}, language = {en}, }