@article{821296,
  author = {Yong Kim and Nicholas Dagalakis and Young-Man Choi},
  title = {Optical Fiber Fabry-Pérot Micro-Displacement Sensor for MEMS In-plane Motion Stage},
  year = {2018},
  number = {187-188},
  month = {2018-02-28 00:02:00},
  publisher = {Journal of Microelectronic Engineering},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924100},
  doi = {https://doi.org/10.1016/j.mee.2017.11.010},
  language = {en},
}