@conference{820931,
  author = {Naftaly Krakover and Robert Ilic and Slava Krylov},
  title = {Resonant Pressure Sensing Using a Micromechanical Cantilever Actuated by Fringing Electrostatic Fields},
  year = {2018},
  month = {2018-04-26 00:04:00},
  publisher = {The 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018, Belfast, IE},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=924800},
  doi = {https://doi.org/10.1109/MEMSYS.2018.8346688},
  language = {en},
}