@article{820451,
  author = {Vikrant Gokhale and Jason Gorman},
  title = {Optical Knife-Edge Displacement Measurement with Sub-Picometer Resolution for RF-MEMS},
  year = {2018},
  month = {2018-08-13 00:08:00},
  publisher = {Journal of Microelectromechanical Systems},
  doi = {https://doi.org/10.1109/JMEMS.2018.2861322},
  language = {en},
}