@article{820281,
  author = {Yoav Kessler and Robert Ilic and Slava Krylov and Alexander Liberzon},
  title = {Flow sensor based on the snap-through detection of a curved micromechanical beam},
  year = {2018},
  number = {27},
  month = {2018-12-01 00:12:00},
  publisher = {IEEE Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925903},
  doi = {https://doi.org/10.1109/JMEMS.2018.2868776},
  language = {en},
}