@article{819826,
  author = {Christopher Sunday and Papa Amoah and Karl Montgomery and Yaw Obeng},
  title = {Broadband Dielectric Spectroscopic Characterization of Thermal Stability of Low-k Die-lectric Thin Films for Micro- and Nanoelectronic Applications},
  year = {2017},
  number = {6},
  month = {2017-08-29 00:08:00},
  publisher = {ECS Journal of Solid State Science and Technology},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923461},
  doi = {https://doi.org/10.1149/2.0141709jss},
  language = {en},
}