@article{819676, author = {Vikrant Gokhale and Jason Gorman}, title = {Approaching the intrinsic quality factor limit for micromechanical bulk acoustic resonators using phononic crystal tethers}, year = {2017}, number = {111}, month = {2017-07-05 00:07:00}, publisher = {Applied Physics Letters}, doi = {https://doi.org/10.1063/1.4990960}, language = {en}, }