@article{819471,
  author = {Gaoliang Dai and Kai Hahm and Harald Bosse and Ronald Dixson},
  title = {Comparison of line width calibration using critical dimension atomic force microscopes between PTB and NIST},
  year = {2017},
  number = {28},
  month = {2017-04-19 00:04:00},
  publisher = {Measurement Science & Technology},
  language = {en},
}