@conference{819121, author = {Houxun Miao and Mona Mirzaeimoghri and Lei Chen and Han Wen}, title = {Deep Silicon Etching for X-Ray Diffraction Devices Fabrication}, year = {2017}, month = {2017-09-28 00:09:00}, publisher = {2017 International Conference on Optical MEMS and Nanophotonics, Santa Fe, NM, US}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=923541}, doi = {https://doi.org/10.1109/OMN.2017.8051446}, language = {en}, }