@inbook{818161,
  author = {Zhiyong Ma and David Seiler},
  title = {Introduction: Characterization and Metrology for Nanoelectronics and Nanostructures},
  year = {2016},
  month = {2016-09-23 00:09:00},
  publisher = {Characterization and Metrology for Nanoelectronics and Nanostructures, Pan Stanford, Singapore, -1},
  language = {en},
}