@article{818126,
  author = {Houxun Miao and Lei Chen and Mona Mirzaeimoghri and Richard Kasica and Han Wen},
  title = {Cryogenic Etching of High Aspect Ratio 400 nm Pitch Silicon Gratings},
  year = {2016},
  month = {2016-07-29 00:07:00},
  publisher = {Journal of Microelectromechanical Systems},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=918475},
  doi = {https://doi.org/10.1109/JMEMS.2016.2593339},
  language = {en},
}