@misc{818046, author = {Krishna Coimbatore Balram and Daron Westly and Marcelo Davanco and Karen Grutter and Qing Li and Thomas Michels and Christopher Ray and Richard Kasica and Christopher Wallin and Ian Gilbert and Brian Bryce and Gregory Simelgor and Juraj Topolancik and Nicolae Lobontiu and Yuxiang Liu and Pavel Neuzil and Vojtech Svatos and Kristen Dill and Neal Bertrand and Meredith Metzler and Gerald Lopez and David Czaplewski and Leonidas Ocola and Kartik Srinivasan and Samuel Stavis and Vladimir Aksyuk and James Liddle and Slava Krylov and Robert Ilic}, title = {The Nanolithography Toolbox}, year = {2016}, number = {121}, month = {2016-10-19 00:10:00}, publisher = {Journal of Research (NIST JRES), National Institute of Standards and Technology, Gaithersburg, MD}, url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=921714}, doi = {https://doi.org/10.6028/jres.121.024}, language = {en}, }