@article{81771,
  author = {Hae-Jeong Lee and Christopher Soles and Da-Wei Liu and Barry Bauer and Wen-Li Wu},
  title = {Pore Size Distributions in Low-K Dielectric Thin Films From X-Ray Porosimetry},
  year = {2002},
  number = {40},
  month = {2002-10-01},
  publisher = {Journal of Polymer Science Part B-Polymer Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852050},
  language = {en},
}