@article{81761,
  author = {Hae-Jeong Lee and Christopher Soles and Da-Wei Liu and Barry Bauer and Eric Lin and Wen-Li Wu},
  title = {Structural Characteristics of Methylsilsesquioxane Based Porous Low-k Thin Films Fabricated with Increasing Cross-Linked Particle Porogen Loading},
  year = {2006},
  number = {100},
  month = {2006-09-01},
  publisher = {Journal of Applied Physics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852378},
  language = {en},
}