@article{81756,
  author = {E Jablonski and S Sambasivan and Daniel Fischer and Eric Lin and C Devadoss and R Puligadda},
  title = {Near Edge X-Ray Absorption Fine Structure Measurements of the Interface Between Bottom Anti-Reflective Coatings and a Model Deprotected Photoresist},
  year = {2003},
  number = {21},
  month = {2003-12-01},
  publisher = {Journal of Vacuum Science and Technology B},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852222},
  language = {en},
}