@article{817546,
  author = {Josh Ballard and Stephen McDonnell and Don Dick and Maia Bischof and Joseph Fu and D Jaeger and James Owen and w Owen and Justin Alexander and Udi Fuchs and Pradeep Namboodiri and Kai Li and John Randall and Robert Wallace and Yves Chabal and Richard Reidy and Richard Silver},
  title = {Pattern Transfer of Hydrogen Depassivation Lithography Patterns into Silicon with Atomically Traceable Placement and Size Control},
  year = {2014},
  month = {2014-07-17 00:07:00},
  publisher = {Science},
  language = {en},
}