@article{81731,
  author = {Ronald Jones and T Hu and Eric Lin and Wen-Li Wu and R Kolb and D Casa and P Bolton and G Barclay},
  title = {Small Angle X-Ray Scattering for Sub-100 nm Pattern Characterization},
  year = {2003},
  number = {83},
  month = {2003-11-01},
  publisher = {Applied Physics Letters},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852166},
  language = {en},
}