@article{817226,
  author = {Atif Imtiaz and Yuan-Jen Chang and Jason Gray and Dragon Seghete and Steven George and Thomas Wallis and Pavel Kabos and Charles Rogers and Victor Bright},
  title = {Micromachined resonators of high Q-factor based on atomic layer deposited alumina},
  year = {2009},
  number = {154},
  month = {2009-09-24 00:09:00},
  publisher = {IEEE Journal of Microelectromechanical Systems},
  doi = {https://doi.org/10.1016/j.sna.2008.11.015},
  language = {en},
}