@conference{816831,
  author = {Adam Steele and Brenton Knuffman and Jabez McClelland},
  title = {New Ion Source for High Precision FIB Nanomachining and Circuit Edit},
  year = {2014},
  month = {2014-12-31 00:12:00},
  publisher = {Proceedings of the International Symposium for Testing and Failure Analysis, Houston, TX, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=917117},
  language = {en},
}