@article{815511,
  author = {James Potzick and Egon Marx},
  title = {Parametric uncertainty in nanoscale optical dimensional measurements},
  year = {2012},
  number = {51},
  month = {2012-06-10 00:06:00},
  publisher = {Applied Optics},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=909217},
  language = {en},
}