@article{814936,
  author = {R Attota and M Bishop and Thomas Germer and L Howard and R Larrabee and R Silver and M Stocker},
  title = {Application of through-focus focus-metric analysis in high resolution optical metrology, ed. by R.M. Silver},
  year = {2005},
  number = {5752},
  month = {2005-01-01 00:01:00},
  publisher = {Metrology Inspection and Process Control for Microlithography XIX Proc SPIE},
  language = {en},
}