@conference{81491,
  author = {John Gillen and Scott Wight and P Chi and Albert Fahey and Jennifer Verkouteren and Eric Windsor and D. Fenner},
  title = {Bevel Depth Profiling SIMS for Analysis of Layer Structures},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {Characterization and Metrology for ULSI Technology: AIP Conference Proceedings, Austin, TX},
  language = {en},
}