@conference{814756,
  author = {S Grantham and Shannon Hill and Charles Tarrio and Robert Vest and Thomas Lucatorto},
  title = {EUV component and system characterization at NIST for the support of extreme-ultraviolet lithography, ed. by R.S. Mackay},
  year = {2005},
  number = {35},
  month = {2005-05-13 00:05:00},
  publisher = {Emerging Lithographic Technologies IX , San Jose, CA, USA},
  language = {en},
}