@conference{81466,
  author = {Cedric Powell and Aleksander Jablonski},
  title = {Measurement of Gate-Oxide Film Thickness by X-ray Photoelectron Spectroscopy},
  year = {2003},
  number = {683},
  month = {2003-09-01},
  publisher = {AIP Conference Proceedings 683, Characterization and Metrology for ULSI Technology: 2003, Austin, TX},
  language = {en},
}